mmdlith
Detect defects in a microelectronic circuit.

The input image is read. The image is also displayed as a surface model.

a = mmreadgray('r4x2_256.tif');

mmshow(a);

mmshow(mmsurf(a));

a	mmsurf(a)

Closing of the image by a vertical line of length 25 pixels. Then subtract it from the original. The sequence closing-subtraction is called closing top-hat. (This could be executed in a single command: c=mmcloseth (a,mmseline (25,90));).

b = mmclose(a,mmseline(25,90));

mmshow(b);

mmshow(mmsurf(b));

b	mmsurf(b)

Subtraction of the closing from the original is called closing top-hat. It shows the discrepancies of the image where the structuring element cannot fit the surface. In this case, it highlights vertical depression with length longer than 25 pixels.

c = mmsubm(b,a);

mmshow(c);

mmshow(mmsurf(c));

c	mmsurf(c)

Threshold on the residues image. Elimination of the small objects by area open.

d = mmcmp(c,'>=',50);

e = mmareaopen(d,5);

mmshow(d);

mmshow(e);

d	e

Overlay the detected defects over the original image, and over the surface display.

mmshow(a,e);

mmshow(mmsurf(a),e);

a,e	mmsurf(a),e